Jun 2, 2003 · In this paper, the performance of different design of alignment marks on 0.10μm echnology wafer has been evaluated using ASML ATHENATM alignment system. For …

Yee Mei Foong's 16 research works with 58 citations and 1,207 reads, including: MPC simplification for established model-based mask process correction solutions

Sep 26, 2019 · Ao Chen, Yee Mei Foong, Jae Yeol Maeng, Nikhil Jain, Steve McDermott Proc. SPIE. 10587, Optical Microlithography XXXI KEYWORDS: Lithography, Calibration, Source …

Yee Mei Foong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United …

May 25, 2023 · Malayan Cement Berhad appointed Miss Fong Yee Mei as Independent and Non Executive Independent Director. Her age is 66. Date of change 30 May 2023. She has done …

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SPIE Profile of Yee Mei Foong, GlobalFoundries Singapore Pte Ltd. SPIE Profiles is a networking platform for optics and photonics professionals.

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