Jun 18, 2001 · The HC3 was co-developed with Axcelis' joint-venture partner Sumitomo Eaton Nova (SEN), representing a second-generation 300-mm high-current system, said the Beverly company.

Shiro Ninomiya A Productivity Improvement Method on SEN’s Single-Wafer High-Current Ion Implanter, the SHX Series HC

The merger between Axcelis Technologies and Sumitomo Heavy Industries dissolved—we became the sole parent company, and with this, the company name changed to SEN Corporation. 2011 Shipment of MC3-II/GP, medium-current ion implanters with …

SEN / SUMITOMO EATON NOVA NV-GSD-HC3 is a powerful, high-capacity, user-friendly ion implanter and monitor that provides uniform ion doses and precise depths with low power consumption and excellent stability. It also features robust materials and intuitive software for customizing the implantation process.

Sumitomo Eaton Nova (SEN) NV-GSD-HC3. used. Manufacturer: Eaton; Wafer size: 12"

Sumitomo Eaton Nova (SEN) NV-GSD-HC3 High Current Implanter available for Sale by SDI Group. Item id:77755, model NV-GSD-HC3 manufactured by Sumitomo Eaton Nova (SEN)

ULTRA/GSD III/HC3 PEF-XE (10048012) . Please log in to our shop to be able to order. If you have no access to our Shop, please complete the.

ULTRA/GSD III/HC3 EXTRACTION II (10047441) Application Note Standard OEM W mesh and Plansee design W foil versions are indicated. The Plansee design W foil, balloon 90 & 110, can be installed and reused without fraying, unlike the standard OEM W mesh, balloon 80 & 100. ... SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382) GSD III SOURCE; GSD ...

SEN / SUMITOMO EATON NOVA NV-GSD-HC3 is an advanced ion implanter and monitor capable of producing and monitoring highly precise and accurate boron and phosphorus implants, incorporating cutting-edge technologies for optimized implantation performance.

ULTRA/GSD III/HC3 EXTRACTION (10047527) . Application Note Plansee offers a modification for the insulator covers OEM# 17E7254 and 17E7255. By removing the holes on the side, balloon 90 and 120, Plansee is able to reduce the cost of the part and still maintain performance. Please log in to our shop to be able to order.