Lam’s VECTOR ® PECVD products are designed to provide the performance and flexibility needed to create these enabling structures within a wide range of challenging device applications.

Our broad portfolio of market-leading products for thin film deposition, plasma etch, photoresist strip, and wafer cleaning are complementary processing steps used throughout semiconductor manufacturing.

At Lam, we relentlessly pursue innovation that pushes the boundaries of technical limitations, creating solutions that enable chipmakers to power progress. No matter what innovation means to you, we won’t stop until it’s proven.

FREMONT, Calif., March 26, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency (RF) filters.

FREMONT, Calif., March 26, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable...

Dec 16, 2021 · In one example, an apparatus used to perform a remote-plasma clean (RPC) in a multi-station process chamber is disclosed and includes an RPC directional-flow device that is to be coupled between an RPC reactor and the process chamber.

FREMONT, Calif., Dec. 10, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced DextroTM, the semiconductor industry's first collaborative robot (cobot) designed to optimize critical maintenance tasks on wafer fabrication equipment.

FREMONT, Calif., Feb. 19, 2025 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today unveiled ALTUS ® Halo, the world's first atomic layer deposition (ALD) tool that harnesses the capabilities of the metal molybdenum in the production of leading-edge semiconductors.

Lam’s SPEED ® HDP-CVD products provide a multiple dielectric film solution for high-quality gapfill with industry-leading throughput and reliability.

FREMONT, Calif., Dec. 10, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced Dextro™, the semiconductor industry's first collaborative robot (cobot) designed to optimize critical maintenance tasks on wafer fabrication equipment.