AMEC is at the forefront of etch innovation with a portfolio of etch technology and tools that enable chipmakers to manufacture at geometries as low as 5nm with competitive cost-of-ownership advantages.

Welcome to Advanced Micro-Fabrication Equipment Inc. China (AMEC, stock code: 688012)—a global micro-fabrication equipment company serving customers in the semiconductor industry and adjacent high-tech sectors.

Advanced Micro-Fabrication Equipment (AMEC; Chinese: 中微半导体设备; pinyin: Zhōngwēi Bàndǎotǐ Shèbèi) is a partially state-owned publicly listed Chinese company that manufactures semiconductor chip production equipment. It is currently one of the largest semiconductor equipment manufacturers in China.

The Primo D-RIE® system, AMEC’s first-generation dielectric etch product, is a 300mm cluster tool that can be configured with up to three dual-station process modules (PM). Each PM allows two wafers to be processed simultaneously while in a single wafer processing environment.

SHANGHAI, March 12, 2018 /PRNewswire/ -- This week at SEMICON China, Advanced Micro-Fabrication Equipment Inc. (AMEC) formally unveiled the Primo nanova® system (nanova) - the company's first...

Mar 16, 2021 · Key differentiations include dual-station chamber design with minimized pumping port effect by innovative chamber design, low-capacitive coupling 3D coil design, and temperature-controlled...

Jul 8, 2015 · This is AMEC's most advanced dielectric Etcher. It was designed to process critical Etch applications at nodes as low as 1xnm.

Dec 21, 2018 · Headquartered in Shanghai, the company is an entrenched supplier of dielectric and TSV Etch tools, helping chipmakers build devices at process nodes as low as 7nm. To date, nearly 800 AMEC process units have been positioned at 40 …

Mar 16, 2021 · Leveraging AMEC’s proven single-station ICP etch technology and the dual-station Primo platform, the system provides a cost-effective solution for addressing the increasingly challenging etch applications, including FEOL/BEOL dielectric and …

Advanced Micro-Fabrication Equipment Inc. China (AMEC, stock code 688012), today celebrated a milestone for its capacitively coupled plasma (CCP) etch systems by shipping its 1500th station to a leading semiconductor manufacturer in China.