The Zeta ™ -20 is a fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. The optical profiling system is powered by ZDot ™ technology, which simultaneously collects high …

The KLA Zeta-20 measures step heights from nanometers to millimeters, plus transparent film thickness measurements. With multi-mode optics, the Zeta-20 provides the 3D surface roughness measurement of smooth (sub-nanometer) and rough (hundreds of microns) surfaces.

The Zeta-20 benchtop 3D non-contact optical profilometer features patented ZDot ™ technology and flexible Multi-Mode optics for measurement of 3D surface topography, film thickness and automated defect inspection. The High Resolution HR configuration is designed specifically for advanced solar applications.

The Zeta-20 Optical Profilometer is a non-contact optical profiler capable of performing non-contact measurement and detailed analysis of large step heights and surface morphology. It is best suited to measuring reflective surfaces but has the capability to measure thin films and some transparent substrates.

Zeta-20 ZDot System – With 15 nm Z resolution, excellent for general purpose analysis. Standard software provides True Color imaging, 2D and 3D image control, and analysis of step height, roughness, and dimensions, even on samples with transparent materials and …

The Zeta-20 can be equipped with a manual or a motorized XY stage. It can be configured to accept samples as large as 14-inches x 7-inches. Specialty stages include tip-tilt stages (course and fine adjustment) and motorized piezo Theta 360 degree stages.

The Zeta™-20 enables analysis and imaging of surface characteristics on all kinds of samples, namely low reflectivity to high reflectivity, smooth to rough, and transparent to opaque based on the proprietary ZDot™ technology.

The Zeta-20 is a high-end microscope for sample review or automated defect inspection. The Zeta-20 3D optical profiling microscope assists R&D and production environments by offering extensive roughness, step height, film thickness measurements, and defect inspection capability.

The Zeta-20 is a fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. The system is powered by ZDot™ technology, which simultaneously collects high-resolution 3D data and a True Color infinite focus image.

The Zeta-20 benchtop optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.