Jun 8, 2020 · Adopting conveyor belts, automated guided vehicle (AGV) and robots, the system helped to reduce 95% of manual handling weight for wafer transportation at Fab 18A warehouse when it’s used for the first time in 2020. Each warehouse staff can reduce 1.8 tons transportation workload every day.

Aug 13, 2019 · With the KUKA wafer handling solution, KUKA has developed the world’s first solution from a single source for the automated transfer and handling of semiconductor cassettes. The application consists of a standardized automated guided vehicle (AGV) and the service-proven LBR iiwa lightweight robot.

Muratec’s specifically designed AGVs adeptly transport semiconductor wafers and equipment between fabrication process stages, minimizing the risk of contamination and human errors, reducing wasted costs, and improving overall efficiency in semiconductor manufacturing.

AGV (Automated Guided Vehicle) An automated transport system equipped with SCARA robot arm, that travels on the floor to "directly" access stocker and process equipment.

AGV - automatic guided vehicles for semiconductor factories In the semiconductor industry internal loading of process tools is done mainly automatically. Silicon wafers are moved from cassettes to the process chamber by a handling robot.

Brooks offers a comprehensive portfolio of configurable atmospheric and vacuum wafer handling platforms and systems. In addition, Brooks provides the ability to create flexible, cost-effective, and unique solutions to meet each customer’s specific application.

In this example, a lightweight robot from the LBR iiwa series is mounted on a KMR 200 CR autonomous automated guided vehicle (AGV). The AGV can maneuver in the smallest of spaces and KUKA’s engineers have developed a sophisticated gripper system for material handling.

Omron’s autonomous solutions work to transport wafer pods and FOUPs between process tools and reduce physical labor, cost and inefficiency while promoting a more flexible overall environment in the front-end fab operation.

The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.

The application consists of four components: Standardized automated guided vehicle (AGV) LBR iiwa lightweight robot Sophisticated wafer handling application including gripper Software