A field emitter array (FEA) is a particular form of large-area field electron source. FEAs are prepared on a silicon substrate by lithographic techniques similar to those used in the fabrication of integrated circuits.

Mar 1, 2025 · In this paper, periodic tip array structures on the surface of La 2 Zr 2 O 7 coating were fabricated by femtosecond laser processing. The density of these arrays is about 6400 tips/cm 2, with an average base diameter of about 100 μm and an average height of about 28 μm.

Mar 15, 2024 · In this work, by employing ultra-low doped field emitters, sharp emitter tips, and relatively small anode–cathode distance, the screening effect in vacuum field emitter arrays is moderately suppressed leading to scalability of large arrays.

Jul 15, 2024 · Here, an ultrasensitive wearable pressure sensor is reported by introducing a stress-concentrated tip-array design and self-adhesive interface for improving the detection limit. A bipyramidal microstructure with various Young's moduli is designed to improve mechanical transfer efficiency from 72.6% to 98.4%.

Feb 5, 2024 · Femtosecond laser processing technology has been used to achieve controlled processing of microtips array on the surface of polycrystalline LaB 6 blocks. Under the condition of ensuring the integrity of the geometric morphology of the tips array, the tips with a height of 10 μ m and a radius of curvature of 1 μ m can be processed.

SPM tip array consists of cells each of which contains sets of tip, lateral comb actuator, springs, and necessary wiring as shown in Fig.2. Here, we primarily concentrate on the optimal design of comb actuators and springs.

Tip-based nanofabrication (TBN) is a rapidly growing alternative to photolithography in the top-down nanomanufacturing category. TBN uses a physical probe in contact or in close proximity to a surface to modify the surface using thermal, mechanical, or electrical fields.

A micromachined process to assemble homogeneous and reproducible tip arrays for field emission applications is developed and characterized. As substrate materia.

Jun 15, 2015 · Professor Wooyoung Shim’s group have developed a new tip array architecture aligning as many as 4,750 ultra sharp Silicon tips on a spring-like elastomer layer surface over an area of one square centimeter.

Jul 30, 2014 · In this work, we report the design, modeling, fabrication, and experimental characterization of a novel ultrafast optical field emission cathode comprised of a large (>100 000 tips), dense (4.6 million tips·cm –2), and highly uniform (<1 nm tip radius deviation) array of nanosharp high-aspect-ratio silicon columns.