SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle …

この SEMI スタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。 万が一英語と日本語とに差異がある場合 …

AMHS for Semiconductor Fab. An automated transport system equipped with SCARA robot arm, that travels on the floor to "directly" access stocker and process equipment. "AGV" is the …

The portfolio of AGV solutions from SSI SCHAEFER includes a wide range of innovative solutions for small load carriers (SSI Compact Load AGVs) and large load carriers (SSI Heavy Load …

Reduce your line-side footprint and deliver material reliably with AMRs & AGVs. AMR & AGV data analytics allow you to optimize fleet sizes and line-side delivery schedules based on fluctuating …

FTV system includes automated guided vehicle (AGV) system and rail guided vehicle (RGV) system. OTV system includes overhead shuttle (OHS) system and overhead hoist transport …

SEMI E84 Specification for Enhanced Carrier Handoff Parallel I/O Interface. Modern Fabs use extensive automated material handling systems (AMHS) to transfer wafer carriers : AGV, …

SEMI HT (High Speed Tower) Use. Equipment for storing vertical carrier between semiconductor processes and production and products. Features. Short Cycle Time ; Fast Moving Speed; …

This one is a 12 tons SEMI-AGV that follow an inductive cable embedded in the ground, in order to avoid any risk during steering and manouvering in tight spaces. It can be upgraded to a fully …

The AGV loads any SEMI E15.1 compliant process tool loadport equipped with a SEMI E84 communication interface. The MLRV integrates into the fab-wide TransNet material control …