This letter presents an oil-filled micro-electro mechanical system (MEMS) resonant pressure sensor based on electrostatic stiffness modulations to mitigate the side effects of oil expansion …

The MLX90820 is a fully integrated absolute pressure sensor for mid-pressure range (10 - 50 bar) applications, with a configurable output in either digital (SENT) or analog (ratiometric to the …

Dec 19, 2023 · Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, …

May 1, 2022 · MEMS technology fundamentals to understand its usages in viscometers are discussed in brief. Review discusses the physics of fluid interaction with its surroundings and …

Engine electronic oil pressure sensor based on piezoresistor pressure sensor MEMS with contactless measure technology is designed in this paper including the low pressure alarm …

Jan 1, 2013 · Micromachined pressure and flow sensors for automotive and aerospace applications are covered in this chapter. MEMS design, fabrication and packaging are …

Jan 5, 2006 · We present a sensor fabricated with MEMS (Micro-Electro-Mechanical Systems) technology that upon immersion quickly measures fluid density and viscosity. The operational …

This work is focused on the real-time detection of particulate matter suspended in the lubricating oil, an important enabler for inline monitoring of lubricant condition for, e.g., predictive …

Jan 8, 2015 · Fully automotive qualified (exceeding AEC-Q100 requirements), the MLX90815 and MLX90816 are discrete micro-electro-mechanical (MEMS) devices for measuring absolute …

Apr 30, 2018 · Sensor technology in the oil industry changes infrequently. Improvements in MEMS sensor technology are creating rapid momentum toward the use of tiny, rugged, and …