Lam’s VECTOR ® PECVD products are designed to provide the performance and flexibility needed to create these enabling structures within a wide range of challenging device …

Our broad portfolio of market-leading products for thin film deposition, plasma etch, photoresist strip, and wafer cleaning are complementary processing steps used throughout semiconductor …

At Lam, we relentlessly pursue innovation that pushes the boundaries of technical limitations, creating solutions that enable chipmakers to power progress. No matter what innovation …

FREMONT, Calif., March 26, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable …

FREMONT, Calif., March 26, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable...

Dec 16, 2021 · In one example, an apparatus used to perform a remote-plasma clean (RPC) in a multi-station process chamber is disclosed and includes an RPC directional-flow device that is …

FREMONT, Calif., Dec. 10, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced DextroTM, the semiconductor industry's first collaborative robot (cobot) designed to …

FREMONT, Calif., Feb. 19, 2025 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today unveiled ALTUS ® Halo, the world's first atomic layer deposition (ALD) tool that harnesses the …

Lam’s SPEED ® HDP-CVD products provide a multiple dielectric film solution for high-quality gapfill with industry-leading throughput and reliability.

FREMONT, Calif., Dec. 10, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced Dextro™, the semiconductor industry's first collaborative robot (cobot) designed to …