KLA’s defect inspection and review systems cover the full range of yield applications within the chip manufacturing environment, including incoming process tool qualification, wafer qualification, research and development, and tool, process and line monitoring.

KLA has a comprehensive portfolio of defect inspection and review systems for advanced chip manufacturing, including additional Surfscan ® unpatterned wafer inspection systems and broadband plasma optical patterned wafer inspectors.

May 30, 2024 · Our broadband plasma (BBP) patterned wafer inspection systems are the flagship product in our comprehensive inspection portfolio. BBP inspectors use advanced optical and …

These features include a high numerical aperture (NA), a tunable illuminator covering DUV, UV and visible wavelengths, selectable optical aper-tures, and advanced automatic defect classification capability.

For 40 years our broadband plasma (BBP) patterned wafer inspectors have been at the forefront of defect discovery for the semiconductor industry. Introduced in 1984, the KLA 2020 was the first automated patterned wafer inspection system for chip production, replacing manual inspection by human operators.

Jul 8, 2019 · With best-in-class image quality and the unique ability to deliver a complete defect pareto in one test, the eDR7380 e-beam wafer defect review system provides faster defect sourcing in development, faster excursion detection, …

Product Fact Sheet Broadband plasma optical patterned wafer inspection system discovers defects that affect the yield and reliability of logic chips The 2935 provides high sensitivity discovery and binning of critical defects across a broad range of process layers, material types and process stacks.

Jun 26, 2007 · KLA-Tencor (NASDAQ: KLAC) today introduced its latest addition to the 28xx brightfield inspection platform, featuring specialized optical configurations that solve the unique …

BFI (Bright Field Inspection) 明场缺陷检测系统 BFI (Bright Field Inspection) Wafer Inspection System BFI-100系列 简介 n 宽波段（紫外光和可见光）光学图形晶圆检测系统 n 高光学分辨率，高检测灵敏度，高产率 Introduction n Broadband (UV & Visible) opticalpattern wafer inspection system n High optical resolution, highinspection sensitivity, high ...

Jul 7, 2014 · By enabling discovery and monitoring of yield-critical defects, these inspectors support chipmakers' integration of complex structures, novel materials and new processes at leading-edge design nodes.