Our metrology solutions provide precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography, wafer geometry and in situ processes.

美国加利福尼亚州圣荷塞,2003 年2 月19 日讯-KLA-Tencor 公司(Nasdaq 代码:KLAC) 于今日正式推出了其业界最先进的光覆层测量解决方案Archer AIM 系统,从而建立了65 纳米以及65纳米以下平版印刷工艺过程控制的新标准。 首先对于整个半导体行业而言,Archer AIM 解决方案有机地融合了新的光栅型技术,有效降低了测量的不确定性,这种不确定性往往与次-100纳米的设计规则中所采用的传统覆层测量方法相关。 Archer AIM 系统能够提供与器件内覆层性能紧密相关的数据,利用 …

Jun 5, 2008 · The Archer 200 lets chipmakers use the industry-standard AIM(TM) target, or even smaller "micro-AIM" targets that can be inserted into different locations within the chip itself. This enhanced overlay target capability enables maximum scanner alignment and hence, device yield.

KLA's metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high-volume manufacturing process monitoring.

Jun 15, 2005 · Metrology giant KLA-Tencor Corp. on Tuesday unveiled its Archer AIM+, an overlay metrology tool that reduces total measurement uncertainty (TMU) by 50 percent compared to its previous generation Archer system.

Feb 19, 2003 · SAN JOSE, Calif. — Archer AIM is an upgrade to the Archer 10 overlay metrology system from KLA-Tencor Corp. intended for use with 65-nm manufacturing process technology. The company intends to discuss Archer AIM at the SPIE microlithography 2003 conference, February 25-26, in Santa Clara, California.

Leveraging KLA-Tencor’s patented AIM™ technology and Archer Analyzer™ software, the Archer 100 enables in-chip metrology and in-field analysis for advance dispositioning and higher-order overlay control.

Feb 19, 2003 · Metrology giant KLA-Tencor Corp. today introduced Archer AIM, an optical overlay metrology system that utilizes a grating style overlay target to overcome the problems associated with overlay metrology beyond the 90nm node.

Sep 5, 2012 · The Archer 500 is part of KLA-Tencor's comprehensive overlay metrology solution, which also includes K-T Analyzer ™, an advanced overlay analysis system, and Recipe Database Manager (RDM), a centralized database of production-proven recipe components.

Currently 12" configured, ( Available size conversion for 8" open cassette handling ) Overlay measurement for ≥45 nm technology nodes Archer AIM+ Main : Industrial PC & LCD monitor Software Version(OS) : Windows XP,V2002SP1 Software Version(APP) : Archer 5.50.03P01 AIM Multilayer ANRA BFCD CPM VIS Color Filter E40E90E94 E87 GEM Target diagnostic XY Separation Imageless Kawasaki Robot & Robot ...