The ZETA™+ spray clean system provides the most effective and flexible batch solution for stripping of photoresist and other films, as well as general clean. Its unique ViPR™ technology offers the highest performance and lowest cost for resist, silicide and general film stripping needs.

Jan 6, 2009 · The ZETA ViPR process is proven at 300mm to effectively remove unreacted metal without attacking the salicide. In particular, it has been demonstrated successfully on cobalt silicide strips and integrates successfully with the most advanced NiPt salicide processes that use lower annealing temperatures to reduce junction leakage, resulting in ...

The company provides upgrade, replacement and other support services. The five main series of equipment produced by the company are/were: ZETA, ORION, ANTARES, POLARIS, and up to late 2024, the MERCURY. In earlier years, the company also produced the SATURN, TITAN and NEPTUNE processing systems.

Jul 10, 2018 · TEL’s ZETA and MERCURY batch spray systems are process-optimized cleaning tools that allow you to become highly flexible and productive – replacing the buildup and mess of dated ashers, wet bench stations and peripheral rinsing/drying equipment with a single tool that etches, strips and cleans in one safe, space-conscious footprint.

FSI International introduces a 300mm-capable Zeta spray system designed for semiconductor wafer cleaning applications. The Zeta system includes an eight chemical flow system for improved process programming flexibility.

Dec 31, 2000 · The reduced-footprint ZETA 200FE and 300FE systems, introduced today, perform clean and strip functions in front-end-of-line (FEOL) processing.

Sep 17, 2008 · The ZETA spray cleaning system uses centrifugal spray combined with versatile chemical delivery technology to prepare chemicals at a controlled composition and temperature for dispensing directly onto wafers.

FSI International, Inc.ed-footprint ZETA Surface Conditioning System platforms have been developed. The ZETA 200FE and 300FE Systems are targeted for clean and strip needs for front-end-of-line (FEOL) processing, a market in which FSI is the leader with over 30% market share.

Jul 26, 2016 · At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide.

FSI / TEL / TOKYO ELECTRON Zeta 300 G3 is a photoresist machine designed for precision lithography in microelectronic, biomedical and optical fabrication.