The PEO-604 quartz tube furnace offers outstanding performance and versatility for demanding thermal applications. It is perfectly suited for research, pilot production and series production and processes up to 50 wafers per process run with a maximum diameter of 200 mm.

The PEO series (PEO-603 and PEO-604- now replaced by PEO-603/4) is ideal tool for R&D purposes and pilot line production tool. It can be applied easily for new unique and sophisticated process development as well low to medium volume production applications.

The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet/dry oxidation and annealing of 4" wafers and pieces.

ATV applies its PEO PEO-604 series successfully into the semiconductor market segment. The PEO series PEO-604 is an ideal tool for R&D purposes and pilot line production tool. It can be applied easily for new unique and sophisticated process development as well as low to medium volume production applications.

ATV’s PEO-604 is a quartz tube semiconductor wafer furnace for oxidation and annealing, processes etc. The system accommodates wafers up to 200mm in diameter, with a flat zone within the furnace for up to 50 wafers (temperature uniformity +/- 1.5°C, over 150mm batch).

Fully automatic furnace with extraction, i.e. possibility to create by-products and for example to make SU8 Pyrolysis process. The furnace programmation is very easy and intuitive. You can create programs with many segments with and without gas flow. Booking is required to use the tool, login is not yet available.

ATV’s PEO range of multipurpose, energy efficient, fast ramping furnaces are designed for semiconductor and related device processing, from R&D through low and medium volume production.

PEO-601 MULTIPURPOSE FAST RAMPING FURNACE. Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added.

Since 1982 ATV is manufacturing the multipurpose fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since then a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment.

ATV PEO 603 – Oxidation Furnace (Wet) Safety • The furnace gets extremely hot and remains hot to the touch hours after it has been turned off. Use extreme caution and wear necessary heat protection. • Do not place hands or other body parts inside …