Ellipsometry is a non-destructive, optical measurement technique that characterizes the optical properties of thin films. It is highly sensitive to changes in the thickness and refractive index of the ...

Multi-layer high-K metal gate (HKMG) film stacks require the adoption of a feedforward process.

Spectroscopic ellipsometry is widely adopted in semiconductor processing, such as in the manufacturing of integrated circuits, flat display panels, and solar cells. However, a conventional ...

The manual goniometer and the manual sample stage allow budget-conscious research and development labs to access cutting-edge rotating compensator ellipsometry. This flexible instrument can be ...

Based on a rotating compensator design, the FilmTek™ 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with multiple angle reflectometry to make it ideally suited for measuring the ...

The manual goniometer and the manual sample stage allow budget-conscious research and development labs to access cutting-edge rotating compensator ellipsometry. This flexible instrument can be ...