AZoNano on MSN2d
Biostability of ALD and Parylene-ALD Coatings in Neural Implants
Evaluating multilayer coatings for neural implants, this study finds hafnium-based ALD layers excel in biostability, ensuring ...
AZOM5y
Plasma Atomic Layer Deposition Processes and Thermal ALD—FlexAL
The ALD product line includes a variety of instruments to satisfy different needs of small-scale manufacturing, corporate R&D, and academia. There is a substantial process library at Oxford ...
Helsinki3y
ALD/ALEt reactors
In addition to our cluster tool, ALD center Finland houses 12 smaller ALD/ALEt tools for thin film deposition and ALD/ALEt process development studies. The center has solid knowhow of hundreds of ALD ...
Nature5d
Atomic Layer Deposition of Aluminum Nitride Thin Films
Atomic Layer Deposition (ALD) is a powerful technique ... by inducing localized heating effects during the deposition process[4]. Furthermore, the development of textured AlN films on platinized ...
AZOM4y
NorthStar Atomic Layer Deposition (ALD) System from SVT Associates
The NorthStar ALD system can be interfaced with other deposition and metrology tools. Integration of in-situ metrology tools and the RoboALD software/system automation increases process ...