Detailed in a recent Microsystems & Nanoengineering article, the sensor combines microelectromechanical systems (MEMS) with complementary metal-oxide-semiconductor (CMOS) technology to push the ...

elements with microelectronics processing in ways which minimize the impact of the MEMS processing on the standard microelectronic (CMOS, BiCMOS, etc.) process and device parameters. This research ...

A step forward in the development of diamond CMOS integrated circuits. A research team at NIMS has developed the world’s first n-channel diamond MOSFET (metal-oxide-semiconductor field-effect ...