Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

Inspired by a super-resolution microscopy technique known as STED ... The processing has been developed and demonstrated with an interferometric lithography tool. Ongoing work focuses on adapting this ...

The significantly smaller wavelength of electrons compared to light allows for higher resolution patterning, enabling the creation of features that can be smaller than 10 nanometers. The EBL process ...

with a resolution down to several tens of nanometres. An extension of this technology could be an alternative option for next-generation, sub-13.5-nm lithography. Many of the technical issues ...

soft lithography employs elastomeric materials, typically polydimethylsiloxane (PDMS), to create patterns and structures with high fidelity and resolution. This versatile technique enables the ...

Computational lithography uses various techniques of resolution enhancement technology (RET) to create more perfect images on the chip as the elements of the transistor get smaller and smaller.

low resolution, high energy consumption, low light efficiency, and insufficient optical power density. To overcome these challenges, the research team built a maskless lithography prototype ...

A gas injection system for FEBIP processes, completely integrated nanomanipulators for e.g. nanoprobing, and a variety of further options complement the uncompromised lithography system ... for ...