Electronics3604d
High-NA EUV lithography: The next leap in chip manufacturing
Extreme ultraviolet (EUV) lithography is at the center of next-generation semiconductor manufacturing as it enables smaller ...
Yahoo27d
Intel has processed 30,000 wafers with High-NA EUV chipmaking tool
Intel installed and started using two High-NA EUV lithography tools from ASML at its D1 development fab near Hillsboro, Oregon, last year and has now processed as many as 30,000 wafers using these ...