Evaluating multilayer coatings for neural implants, this study finds hafnium-based ALD layers excel in biostability, ensuring ...

Recent research has focused on optimizing the ALD process for ruthenium and its oxide forms, exploring various precursors and deposition conditions to enhance film quality and performance.

The ALD product line includes a variety of instruments to satisfy different needs of small-scale manufacturing, corporate R&D, and academia. There is a substantial process library at Oxford ...

In addition to our cluster tool, ALD center Finland houses 12 smaller ALD/ALEt tools for thin film deposition and ALD/ALEt process development studies. The center has solid knowhow of hundreds of ALD ...

i.e. Particle ALD. A current focus in the lab includes developing a fundamental understanding of the fluidized bed reactor process used to carry out the coating and improving the process as well as ...