Evaluating multilayer coatings for neural implants, this study finds hafnium-based ALD layers excel in biostability, ensuring ...
In addition to our cluster tool, ALD center Finland houses 12 smaller ALD/ALEt tools for thin film deposition and ALD/ALEt process development studies. The center has solid knowhow of hundreds of ALD ...
Atomic Layer Deposition (ALD) is a powerful technique ... by inducing localized heating effects during the deposition process[4]. Furthermore, the development of textured AlN films on platinized ...