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HfO2
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XRD
HfO2
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HfO2
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H2O2 ALD
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Al2O3
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TEM images of ALD-prepared HfO 2 /SiO 2 6-IDM samples. (a) T ALD …
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Hafnium oxide (HfO 2 ) -ALD process specification | Downloa…
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Hafnium oxide (HfO 2 ) -ALD process specification | Download Table
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BALD Engineering - Born in Finland, Born to ALD: Ferroelect…
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ALD HfO2 film thicknesses obtained f…
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XTEM images of ALD-HfO2 films de…
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(a) HAADF STEM images of HfO2 deposits from substr…
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FEG-SEM images showing the evoluti…
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ALD recipes for Al 2 O 3 , HfO 2 and SiO 2 | Do…
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Molecular strucutre of TEMAH, the used ALD precursor for HfO…
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(a) The thickness of HfO2 film increased lin…
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FEG-SEM images showing the evolution …
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(PDF) Electrical properties of AL…
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The AFM images (2×2μm 2 ) of ALD HfO 2 film at 110 C deposition ...
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a: Dependence of the HfO 2 deposition (5 …
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AFM on ALD HfO2 film deposited on S…
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Figure 3 from Characteristics of ALD HfSiO/sub x/ using new Si ...
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The temperature windows for ALD HfO 2 and ZrO 2 with TDEAH and TDEAZ ...
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Figure 11 from ALD HfO/sub 2/ using heavy water (D/sub 2/…
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One of the two viewports on our ALD system onto which …
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(a) HAADF STEM image of an ALD HfO2 cluster (16 cycle…
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(a) HAADF STEM image o…
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Figure 1 from Impact of ALD Hf…
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a) Schematic illustration of TFTs based on ALD‐ZnO/HfO2 with various ...
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ALD process to prepare the HfO 2 -Al 2 O 3 dielectric. …
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Figure 1 from Thermal Stability of ALD-HfO2/GaAs Pretreate…
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Figure 3 from ALD preparation of high-k HfO2 thin films with enhanc…
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